摘要
Wafer map defect pattern classification using convolutional neural network (CNN) has gained a lot of attention in recent years but it demands huge computation and memory cost. Therefore, a WDP-BNN framework based on the binarized neural network is proposed to reduce memory requirement by 29.70× and speed up by 1.66×. To overcome the imbalance problem and performance loss due to binarization of network, advanced data augmentation methods including (Chip Reverse, Chip Translate, Chip Combine) along with random under-sampling method have incorporated in the framework. Experimental results on the WM-811K dataset have demonstrated that the WDP-BNN model has outperformed the state-of-the-art works with the highest classification accuracy of 94.83% and the memory reduction of 1.10-25.93×.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | 76-86 |
| 页数 | 11 |
| 期刊 | Integration |
| 卷 | 85 |
| DOI | |
| 出版状态 | 已出版 - 7月 2022 |
| 已对外发布 | 是 |
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