Wafer-Scale Waveguide Platform on Thin Film Lithium Niobate

Ya Cheng

doi:10.23919/OECC/PSC62146.2025.11110225

Wafer-Scale Waveguide Platform on Thin Film Lithium Niobate

Ya Cheng^*

^*此作品的通讯作者

物理与电子科学学院

CAS - Shanghai Institute of Optics and Fine Mechanics

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

We develop photolithography assisted chemo-mechanical etching (PLACE) and apply it for fabricating PICs on TFLN, ranging from low-loss optical delay lines and photonic neural network to EO tunable lasers and high-power waveguide amplifiers.

源语言	英语
主期刊名	OECC/PSC 2025 - 30th OptoElectronics and Communications Conference/International Conference on Photonics in Switching and Computing 2025
出版商	Institute of Electrical and Electronics Engineers Inc.
版本	2025
ISBN（电子版）	9784885523526
DOI	https://doi.org/10.23919/OECC/PSC62146.2025.11110225
出版状态	已出版 - 2025
活动	30th OptoElectronics and Communications Conference and 2025 International Conference on Photonics in Switching and Computing, OECC/PSC 2025 - Sapporo, 日本期限: 29 6月 2025 → 3 7月 2025

会议

会议	30th OptoElectronics and Communications Conference and 2025 International Conference on Photonics in Switching and Computing, OECC/PSC 2025
国家/地区	日本
市	Sapporo
时期	29/06/25 → 3/07/25

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10.23919/OECC/PSC62146.2025.11110225

其它文件与链接

链接到 Scopus 的出版物

引用此

@inproceedings{323f0fec260b40f4988327f54bb3d899,

title = "Wafer-Scale Waveguide Platform on Thin Film Lithium Niobate",

abstract = "We develop photolithography assisted chemo-mechanical etching (PLACE) and apply it for fabricating PICs on TFLN, ranging from low-loss optical delay lines and photonic neural network to EO tunable lasers and high-power waveguide amplifiers.",

keywords = "Photonic integration, Thin film lithium niobate passive devices, Waveguide amplifiers and lasers",

author = "Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2025 The Institute of Electronics, Information and Communication Engineers (IEICE).; 30th OptoElectronics and Communications Conference and 2025 International Conference on Photonics in Switching and Computing, OECC/PSC 2025 ; Conference date: 29-06-2025 Through 03-07-2025",

year = "2025",

doi = "10.23919/OECC/PSC62146.2025.11110225",

language = "英语",

booktitle = "OECC/PSC 2025 - 30th OptoElectronics and Communications Conference/International Conference on Photonics in Switching and Computing 2025",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

address = "美国",

edition = "2025",

}

Cheng, Y 2025, Wafer-Scale Waveguide Platform on Thin Film Lithium Niobate. 在 OECC/PSC 2025 - 30th OptoElectronics and Communications Conference/International Conference on Photonics in Switching and Computing 2025. 2025 编辑, Institute of Electrical and Electronics Engineers Inc., 30th OptoElectronics and Communications Conference and 2025 International Conference on Photonics in Switching and Computing, OECC/PSC 2025, Sapporo, 日本, 29/06/25. https://doi.org/10.23919/OECC/PSC62146.2025.11110225

TY - GEN

T1 - Wafer-Scale Waveguide Platform on Thin Film Lithium Niobate

AU - Cheng, Ya

PY - 2025

Y1 - 2025

N2 - We develop photolithography assisted chemo-mechanical etching (PLACE) and apply it for fabricating PICs on TFLN, ranging from low-loss optical delay lines and photonic neural network to EO tunable lasers and high-power waveguide amplifiers.

AB - We develop photolithography assisted chemo-mechanical etching (PLACE) and apply it for fabricating PICs on TFLN, ranging from low-loss optical delay lines and photonic neural network to EO tunable lasers and high-power waveguide amplifiers.

KW - Photonic integration

KW - Thin film lithium niobate passive devices

KW - Waveguide amplifiers and lasers

UR - https://www.scopus.com/pages/publications/105015882349

U2 - 10.23919/OECC/PSC62146.2025.11110225

DO - 10.23919/OECC/PSC62146.2025.11110225

M3 - 会议稿件

AN - SCOPUS:105015882349

BT - OECC/PSC 2025 - 30th OptoElectronics and Communications Conference/International Conference on Photonics in Switching and Computing 2025

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th OptoElectronics and Communications Conference and 2025 International Conference on Photonics in Switching and Computing, OECC/PSC 2025

Y2 - 29 June 2025 through 3 July 2025

ER -

Wafer-Scale Waveguide Platform on Thin Film Lithium Niobate

摘要

会议

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