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Ultralow-Power Tuning and Nonvolatile Operation on a Hybrid Silicon Nitride/Barium Titanate Integrated Photonics Platform

  • Xin Wang
  • , Jie Tu
  • , Min Sun
  • , Wenfeng Zhou
  • , Zhibo Cheng
  • , Yikai Su
  • , Binbin Chen*
  • , Yong Zhang*
  • *此作品的通讯作者
  • Shanghai Jiao Tong University
  • East China Normal University

科研成果: 期刊稿件文章同行评审

摘要

The information era imposes increasing demands on speed and energy efficiency, pushing conventional electronics to its physical limits. Silicon photonics offers a promising path forward, particularly when integrated with electro-optic ferroelectric materials, which can overcome fundamental bottlenecks in data rate and power consumption. With pronounced electro-optic activity and controllable ferroelectric domain orientation, thin-film barium titanate (BTO) presents a promising platform for advanced photonic integration. Here, we fabricate epitaxial BTO films on MgO substrates and use precise structural design to realize silicon nitride-BTO (SiN-BTO) hybrid microring devices. Through co-optimization of material synthesis and device architecture, we achieve a record-low power consumption of 0.0015 nW/pm─among the best reported values for electro-optic tuners and exhibiting the highest effective electro-optic coefficient for BTO-on-MgO platforms. Furthermore, we demonstrate nonvolatile tuning enabled by ferroelectric domain control, achieving an eight-level photonic device stable for over 12 h and optically readable switching energy of 0.191 pJ. This work establishes a versatile platform integrating the multifunctionality of ferroelectric BTO with energy-efficient photonic operation, providing a foundation for scalable circuits in next-generation communication, sensing, and computing systems.

源语言英语
页(从-至)42188-42197
页数10
期刊ACS Nano
19
50
DOI
出版状态已出版 - 23 12月 2025

联合国可持续发展目标

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  1. 可持续发展目标 7 - 经济适用的清洁能源
    可持续发展目标 7 经济适用的清洁能源

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