Transient current study on Pt/TiO_2-x/Pt capacitor

Transient transport characteristic has been studied in the Pt/TiO _2-x /Pt devices. A peak in the current density-time (J-t ) curve was observed under direct-current (dc) electric field stress. The peak position (τ) was investigated as a function of various dc field stress and measurement temperature (T). With increase of field stress and T, τ exhibits a decrease. After analyzing the present result according to space-charge-limited current (SCLC) theory and electron/hole conduction influenced mode, we concluded that the transient current of Pt/TiO_2-x /Pt device does not come from the oxygen vacancy (V_o) migration directly, but the electron/hole transport. The peak in the J-t curve is attributed to the change of electron/hole conduction caused by V_o redistribution under dc field stress.