Tilted nano-grating based ultra-compact broadband polarizing beam splitter for silicon photonics

Haipeng Liu; Jijun Feng; Jinman Ge; Shanqing Zhuang; Shuo Yuan; Yishu Chen; Xiaojun Li; Qinggui Tan; Qinghua Yu; Heping Zeng

doi:10.3390/nano11102645

Tilted nano-grating based ultra-compact broadband polarizing beam splitter for silicon photonics

Haipeng Liu
, Jijun Feng^*
, Jinman Ge
, Shanqing Zhuang
, Shuo Yuan
, Yishu Chen
, Xiaojun Li
, Qinggui Tan
, Qinghua Yu
, Heping Zeng

^*此作品的通讯作者

精密光谱科学与技术高等研究院

University of Shanghai for Science and Technology
China Aerospace Science and Technology Corporation
CAS - Shanghai Institute of Technical Physics

科研成果: 期刊稿件 › 文章 › 同行评审

18 引用（Scopus）

摘要

An ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling region is only 6.8 μm, while an extinction ratio of 23.76 dB can be realized at a wavelength of 1550 nm. As a proof of concept, the device was fabricated by a commercial silicon photonic foundry. It can realize a 19.84 dB extinction ratio and an 80 nm working bandwidth with an extinction ratio of larger than 10 dB. The presented device also shows a good fabrication tolerance to the structure deviations, which is favorable for its practical applications in silicon photonics.

源语言	英语
文章编号	2645
期刊	Nanomaterials
卷	11
期	10
DOI	https://doi.org/10.3390/nano11102645
出版状态	已出版 - 10月 2021

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title = "Tilted nano-grating based ultra-compact broadband polarizing beam splitter for silicon photonics",

abstract = "An ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling region is only 6.8 μm, while an extinction ratio of 23.76 dB can be realized at a wavelength of 1550 nm. As a proof of concept, the device was fabricated by a commercial silicon photonic foundry. It can realize a 19.84 dB extinction ratio and an 80 nm working bandwidth with an extinction ratio of larger than 10 dB. The presented device also shows a good fabrication tolerance to the structure deviations, which is favorable for its practical applications in silicon photonics.",

keywords = "Integrated photonics, Nano-grating, Polarizing beam splitter, Silicon photonics",

author = "Haipeng Liu and Jijun Feng and Jinman Ge and Shanqing Zhuang and Shuo Yuan and Yishu Chen and Xiaojun Li and Qinggui Tan and Qinghua Yu and Heping Zeng",

note = "Publisher Copyright: {\textcopyright} 2021 by the authors. Licensee MDPI, Basel, Switzerland.",

year = "2021",

month = oct,

doi = "10.3390/nano11102645",

language = "英语",

volume = "11",

journal = "Nanomaterials",

issn = "2079-4991",

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TY - JOUR

T1 - Tilted nano-grating based ultra-compact broadband polarizing beam splitter for silicon photonics

AU - Liu, Haipeng

AU - Feng, Jijun

AU - Ge, Jinman

AU - Zhuang, Shanqing

AU - Yuan, Shuo

AU - Chen, Yishu

AU - Li, Xiaojun

AU - Tan, Qinggui

AU - Yu, Qinghua

AU - Zeng, Heping

PY - 2021/10

Y1 - 2021/10

N2 - An ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling region is only 6.8 μm, while an extinction ratio of 23.76 dB can be realized at a wavelength of 1550 nm. As a proof of concept, the device was fabricated by a commercial silicon photonic foundry. It can realize a 19.84 dB extinction ratio and an 80 nm working bandwidth with an extinction ratio of larger than 10 dB. The presented device also shows a good fabrication tolerance to the structure deviations, which is favorable for its practical applications in silicon photonics.

AB - An ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling region is only 6.8 μm, while an extinction ratio of 23.76 dB can be realized at a wavelength of 1550 nm. As a proof of concept, the device was fabricated by a commercial silicon photonic foundry. It can realize a 19.84 dB extinction ratio and an 80 nm working bandwidth with an extinction ratio of larger than 10 dB. The presented device also shows a good fabrication tolerance to the structure deviations, which is favorable for its practical applications in silicon photonics.

KW - Integrated photonics

KW - Nano-grating

KW - Polarizing beam splitter

KW - Silicon photonics

UR - https://www.scopus.com/pages/publications/85116546847

U2 - 10.3390/nano11102645

DO - 10.3390/nano11102645

M3 - 文章

AN - SCOPUS:85116546847

SN - 2079-4991

VL - 11

JO - Nanomaterials

JF - Nanomaterials

IS - 10

M1 - 2645

ER -

Tilted nano-grating based ultra-compact broadband polarizing beam splitter for silicon photonics

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