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Three-dimensional laser printing of macro-scale glass objects at a micro-scale resolution

  • Tongji University
  • CAS - Shanghai Institute of Optics and Fine Mechanics

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Femtosecond laser-induced chemical etching (FLICE) has proved itself a powerful approach when attempting to fabricate three-dimensional (3D) microstructures in glass, whereas maintaining a high spatial resolution in fabricating samples of great heights/thicknesses is challenging due to the diffraction nature of light waves. Here, we demonstrate the fabrication of macro-scale 3D glass objects of large heights up to ∼3.8 cm with a well-balanced lateral and longitudinal resolution of ∼20 μm using the FLICE. Moreover, a freeform hand printed with embedded blood vessel system has been produced. The remarkable accomplishments are achieved by revealing an unexplored regime in the interaction of ultrafast laser pulses with fused silica, which gives rise to depth-insensitive focusing of the laser pulses and polarization-independent selective etching inside fused silica. We examine the difference in the plasma dynamics between interactions of picosecond and femtosecond laser pulses with fused silica glass.

源语言英语
主期刊名Laser-Based Micro- and Nanoprocessing XIV
编辑Udo Klotzbach, Akira Watanabe, Rainer Kling
出版商SPIE
ISBN(电子版)9781510632998
DOI
出版状态已出版 - 2020
活动Laser-Based Micro- and Nanoprocessing XIV 2020 - San Francisco, 美国
期限: 3 2月 20206 2月 2020

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
11268
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Laser-Based Micro- and Nanoprocessing XIV 2020
国家/地区美国
San Francisco
时期3/02/206/02/20

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