@inproceedings{9d6327be80e84943a2720c3abcfcd545,
title = "The synthesis and properties of nano-SnO2 thin film by sol-gel",
abstract = "Tin oxide nano-films with different grain-diameter have been synthesized by the modified sol-gel method, used tin chloride dihydrate (SnCl 2•2H2O) as main materials and ethanol as solvent. After magnetic agitation and ageing, tin oxide (SnO2) thin films were prepared on silicon substrates by spin-coat process and then annealed at different temperature in oxygen atmosphere. The obtained samples are polycrystalline films with rutile structure and have preferred orientation of (110) direction. The crystal structure, the morphology, and the optical property of the thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Fourier Transform Infrared Spectrometer (FT-IR).",
keywords = "Nano, Property, SnO, Sol-gel, Synthesis, Tin oxide",
author = "Sumei Qin and Ziyang Tong and Ming Guo and Hongmei Deng and Pingxiong Yang",
year = "2008",
doi = "10.1117/12.792631",
language = "英语",
isbn = "9780819471826",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Sixth International Conference on Thin Film Physics and Applications",
note = "6th International Conference on Thin Film Physics and Applications, TFPA 2007 ; Conference date: 25-09-2007 Through 28-09-2007",
}