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Synthesis of diamond-like carbon films from Polymer

  • Zhihao Zheng
  • , Zhuo Sun
  • , Qiheng Yang
  • , Ning Xu
  • East China Normal University
  • CAS - Shanghai Institute of Microsystem and Information Technology

科研成果: 期刊稿件会议文章同行评审

摘要

Polymer (C6H6C)n, (i.e.(RC)n, R=Ph=Phenyl), synthesized by chemical reaction, is a pyrolytic precursor to carbon. The carbon-based network backbone structure in polymer, under pyrolysis, could be converted to hard, abrasive and highly reflective solid. The powder of this solid can easily scratch glass and quartz plates. After pyrolysis, the films, coated by using (RC)n on various substracts Si, silica, Al2O3, exhibit linear temperature-dependence property of its electrical surface resistance. By SEM, diamond crystallites with grain size from several tens nanometers to several microns have been observed. It proves that under heat decomposition, carbon-based network backbone structures have converted to sp3-bonded carbon phases.

源语言英语
页(从-至)566-569
页数4
期刊Proceedings of SPIE - The International Society for Optical Engineering
2364
DOI
出版状态已出版 - 26 10月 1994
活动2nd International Conference on Thin Film Physics and Applications 1994 - Shanghai, 中国
期限: 15 4月 199417 4月 1994

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