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Suspended Graphene/LiTaO3 Pyro-FeFETs for high-sensitivity uncooled infrared detection

  • Dachuan Liu
  • , Qianru Zhao
  • , Binmin Wu*
  • , Yuqing Zheng
  • , Xinfeng Hu
  • , Ziyu Zhang
  • , Tianjun Cai
  • , Xinyue Lv
  • , Guichen Teng
  • , Ke Xiong
  • , Haoran Yan
  • , Zhourui Hu
  • , Shuaiqin Wu
  • , Chang Liu
  • , Cheng Wei
  • , Jian Wang
  • , Wenxin Li
  • , Yan Chen
  • , Tie Lin
  • , Xiangjian Meng*
  • Hong Shen, Xudong Wang*, Junhao Chu, Jianlu Wang
*此作品的通讯作者
  • CAS - Shanghai Institute of Technical Physics
  • ShanghaiTech University
  • University of Chinese Academy of Sciences
  • Fudan University
  • Shanghai Key Laboratory of Optical Coatings and Spectral Modulation

科研成果: 期刊稿件文章同行评审

摘要

Pyroelectric detectors are widely employed as uncooled infrared sensors. However, their conventional capacitor-based design generates weak electrical signals, requiring complex external amplification that limits integration density and signal-to-noise ratio. Here, we design and fabricate suspended pyroelectric-ferroelectric field-effect transistors (Pyro-FeFETs) featuring a monocrystalline lithium tantalate (LiTaO3) gate dielectric and a graphene channel. Infrared-induced temperature variations alter the ferroelectric spontaneous polarization in LiTaO3 due to perturbation of its internal dipole alignment. This ferroelectric polarization change effectively modulates the carrier concentration and conductivity of the graphene channel, resulting in a measurable current signal through the source-drain electrodes. Leveraging inherent nonlinear signal amplification of field-effect transistors and a suspended micro-bridge for enhanced thermal isolation, the device achieves uncooled blackbody infrared detection with a specific detectivity of 1.4 × 109 cm Hz1/2 W−1 and a response time of 51/38 ms. This integrated sensing-amplification architecture establishes a promising architecture for highly sensitive and compact uncooled infrared systems.

源语言英语
文章编号100219
期刊Materials Today Electronics
16
DOI
出版状态已出版 - 6月 2026
已对外发布

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