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Study on the crystallization behaviors of Si2Sb 2Tex materials

  • Kun Ren*
  • , Feng Rao
  • , Zhitang Song
  • , Yan Cheng
  • , Liangcai Wu
  • , Xilin Zhou
  • , Yuefeng Gong
  • , Mengjiao Xia
  • , Bo Liu
  • , Songlin Feng
  • *此作品的通讯作者
  • CAS - Shanghai Institute of Microsystem and Information Technology
  • University of Chinese Academy of Sciences

科研成果: 期刊稿件文章同行评审

摘要

The crystallization behaviors and mechanisms of Si2Sb 2Tex (x = 1, 3 and 6) were investigated. The crystallization process in Si2Sb2Tex films were proved to be layer by layer, which is the same as that of GeSbTe material. Among the three compositions, Si2Sb2Te3 has the best phase stability, the best data retention and a high crystallization speed. These results indicate that choosing Sb2Te3 as the basis for Si doping is the best way to optimize the properties of Si-Sb-Te materials.

源语言英语
页(从-至)685-688
页数4
期刊Scripta Materialia
64
7
DOI
出版状态已出版 - 4月 2011
已对外发布

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