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Study on the composition profile of a Hg1-xCdxTe epitaxy film by infrared transmission spectroscopy

  • Biao Li*
  • , Junhao Chu
  • , Kun Liu
  • , Dingyuan Tang
  • *此作品的通讯作者
  • Chinese Academy of Sciences

科研成果: 期刊稿件文章同行评审

摘要

Based on our empirical rules for the intrinsic absorption coefficient and refractive index of Hg1-xCdxTe in Hougen's model, a useful method for determining the composition profile of an epitaxy layer from room-temperature infrared transmittance spectroscopy is presented. The compositional depth non-uniformity of Hg1-xCdxTe film samples grown by liquid-phase epitaxy, metal-organic chemical vapour deposition and molecular beam epitaxy techniques is determined using this method and compared with that from secondary ion mass spectroscopy and X-ray microprobic measurements.

源语言英语
文章编号004
页(从-至)29-35
页数7
期刊Journal of Physics Condensed Matter
7
1
DOI
出版状态已出版 - 1995
已对外发布

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