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Study on multi-wavelength thin film thickness determination method

投稿的翻译标题: 多波长薄膜厚度检测方法研究
  • Ce Shi
  • , Mao Bin Xie
  • , Wei Bo Zheng
  • , Ruo Nan Ji
  • , Shao Wei Wang*
  • , Wei Lu*
  • *此作品的通讯作者
  • ShanghaiTech University
  • CAS - Shanghai Institute of Technical Physics
  • Shanghai Engineering Research Center of Energy-Saving Coatings
  • Shanghai Key Laboratory of Optical Coatings and Spectral Modulation

科研成果: 期刊稿件文章同行评审

摘要

This work introduces a novel method for measuring thin film thickness,employing a multi-wavelength method that significantly reduces the need for broad-spectrum data. Unlike traditional techniques that require sev⁃ eral hundred spectral data points,the multi-wavelength method achieves precise thickness measurements with data from only 10 wavelengths. This innovation not only simplifies the process of spectral measurement analysis but al⁃ so enables accurate real-time thickness measurement on industrial coating production lines. The method effective⁃ ly reconstructs and fits the visible spectrum(400-800 nm)using a minimal amount of data,while maintaining measurement error within 7. 1%. This advancement lays the foundation for more practical and efficient thin film thickness determination techniques in various industrial applications.

投稿的翻译标题多波长薄膜厚度检测方法研究
源语言英语
页(从-至)813-819
页数7
期刊Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
43
6
DOI
出版状态已出版 - 12月 2024
已对外发布

联合国可持续发展目标

此成果有助于实现下列可持续发展目标:

  1. 可持续发展目标 9 - 产业、创新和基础设施
    可持续发展目标 9 产业、创新和基础设施

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