摘要
This work introduces a novel method for measuring thin film thickness,employing a multi-wavelength method that significantly reduces the need for broad-spectrum data. Unlike traditional techniques that require sev⁃ eral hundred spectral data points,the multi-wavelength method achieves precise thickness measurements with data from only 10 wavelengths. This innovation not only simplifies the process of spectral measurement analysis but al⁃ so enables accurate real-time thickness measurement on industrial coating production lines. The method effective⁃ ly reconstructs and fits the visible spectrum(400-800 nm)using a minimal amount of data,while maintaining measurement error within 7. 1%. This advancement lays the foundation for more practical and efficient thin film thickness determination techniques in various industrial applications.
| 投稿的翻译标题 | 多波长薄膜厚度检测方法研究 |
|---|---|
| 源语言 | 英语 |
| 页(从-至) | 813-819 |
| 页数 | 7 |
| 期刊 | Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves |
| 卷 | 43 |
| 期 | 6 |
| DOI | |
| 出版状态 | 已出版 - 12月 2024 |
| 已对外发布 | 是 |
联合国可持续发展目标
此成果有助于实现下列可持续发展目标:
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可持续发展目标 9 产业、创新和基础设施
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