TY - GEN
T1 - Study of droplets motion on a chip driven by thermal gradient
AU - Gao, Anran
AU - Li, Tie
AU - Liu, Xiang
PY - 2011
Y1 - 2011
N2 - In this paper a microfluidic device for actuation of liquid droplets on a solid surface was designed, fabricated and tested. The digital microfluidic chip with Ti as micro-heater, Au film as pad, PECVD SiO2 as dielectric layer on glass substrate, is fabricated by the silicon bulk process. Test results show that deionized (DI) water and silicon oil can be transported on device surface smoothly under voltage of 7V. We have also drawn out that the speed of droplet is a function of applied thermal gradient, droplet size and liquid material parameters. In this study we demonstrate that the thermocapillary actuation droplet can be tunable.
AB - In this paper a microfluidic device for actuation of liquid droplets on a solid surface was designed, fabricated and tested. The digital microfluidic chip with Ti as micro-heater, Au film as pad, PECVD SiO2 as dielectric layer on glass substrate, is fabricated by the silicon bulk process. Test results show that deionized (DI) water and silicon oil can be transported on device surface smoothly under voltage of 7V. We have also drawn out that the speed of droplet is a function of applied thermal gradient, droplet size and liquid material parameters. In this study we demonstrate that the thermocapillary actuation droplet can be tunable.
KW - droplets
KW - silicon bulk process
KW - thermal gradient
UR - https://www.scopus.com/pages/publications/80053322258
U2 - 10.1109/NEMS.2011.6017339
DO - 10.1109/NEMS.2011.6017339
M3 - 会议稿件
AN - SCOPUS:80053322258
SN - 9781612847757
T3 - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
SP - 241
EP - 244
BT - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
T2 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Y2 - 20 February 2011 through 23 February 2011
ER -