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Structure investigation on Hg1-xCdxTe liquid phase epitaxial films grown by the meltetch technique

  • Biao Li*
  • , Y. S. Gui
  • , J. Q. Zhu
  • , J. H. Chu
  • *此作品的通讯作者
  • CAS - Shanghai Institute of Technical Physics

科研成果: 期刊稿件文章同行评审

摘要

Hg1-xCdxTe films were grown by a modified meltetch liquid phase epitaxial (LPE) technique which includes both substrate and epilayer etchback steps. The crystal quality of epilayer has been investigated by means of transmission electron microscopy, scanning electron microscopy, and double crystal x-ray diffraction. It has been found that adequate meltetch of the substrate at the beginning of LPE provides a fresh and flat surface for epitaxial growth, while epilayer meltetch at the end of LPE may prevent spurious melt sticking.

源语言英语
页(从-至)51-54
页数4
期刊Journal of Electronic Materials
27
2
DOI
出版状态已出版 - 2月 1998
已对外发布

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