摘要
Cubic heteroepitaxial (001) SrMnO3-δ (SMO) films were grown on SrTiO3 substrates by atomic alternating layer molecular beam epitaxy. Precise control of cation stoichiometry was achieved by in situ reflection high-energy electron diffraction (RHEED) oscillation. During SMO film growth, a correlation between RHEED oscillation features and the cation stoichiometry/monolayer dose was established. In non-stoichiometric films, there were out-of-plane lattice expansions due to off-stoichiometry-dependent defects, including Ruddlesden-Popper SrO planar faults in Sr-rich films and Sr vacancy defect clusters in Mn-rich films.
| 源语言 | 英语 |
|---|---|
| 文章编号 | 232903 |
| 期刊 | Applied Physics Letters |
| 卷 | 118 |
| 期 | 23 |
| DOI | |
| 出版状态 | 已出版 - 7 6月 2021 |
指纹
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