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Specific cation stoichiometry control of SrMnO3-δ thin films via RHEED oscillations

  • East China Normal University
  • Shanxi University

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Cubic heteroepitaxial (001) SrMnO3-δ (SMO) films were grown on SrTiO3 substrates by atomic alternating layer molecular beam epitaxy. Precise control of cation stoichiometry was achieved by in situ reflection high-energy electron diffraction (RHEED) oscillation. During SMO film growth, a correlation between RHEED oscillation features and the cation stoichiometry/monolayer dose was established. In non-stoichiometric films, there were out-of-plane lattice expansions due to off-stoichiometry-dependent defects, including Ruddlesden-Popper SrO planar faults in Sr-rich films and Sr vacancy defect clusters in Mn-rich films.

源语言英语
期刊论文编号232903
期刊Applied Physics Letters
卷118
期23
DOI
出版状态已出版 - 7 6月 2021

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