Simulation and fabrication of carbon nanotubes field emission pressure sensors

Kaiyou Qian; Ting Chen; Bingyong Yan; Yangkui Lin; Dong Xu; Zhuo Sun; Bingchu Cai

doi:10.1016/j.apsusc.2005.06.029

Simulation and fabrication of carbon nanotubes field emission pressure sensors

Kaiyou Qian^*
, Ting Chen
, Bingyong Yan
, Yangkui Lin
, Dong Xu
, Zhuo Sun
, Bingchu Cai

^*此作品的通讯作者

物理与电子科学学院

Ministry of Education of the People's Republic of China
East China Normal University

科研成果: 期刊稿件 › 文章 › 同行评审

12 引用（Scopus）

摘要

A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors.

源语言	英语
页（从-至）	4198-4201
页数	4
期刊	Applied Surface Science
卷	252
期	12
DOI	https://doi.org/10.1016/j.apsusc.2005.06.029
出版状态	已出版 - 15 4月 2006

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abstract = "A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors.",

keywords = "Carbon nanotubes, Field emission, Pressure sensors",

author = "Kaiyou Qian and Ting Chen and Bingyong Yan and Yangkui Lin and Dong Xu and Zhuo Sun and Bingchu Cai",

year = "2006",

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T1 - Simulation and fabrication of carbon nanotubes field emission pressure sensors

AU - Qian, Kaiyou

AU - Chen, Ting

AU - Yan, Bingyong

AU - Lin, Yangkui

AU - Xu, Dong

AU - Sun, Zhuo

AU - Cai, Bingchu

PY - 2006/4/15

Y1 - 2006/4/15

N2 - A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors.

AB - A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors.

KW - Carbon nanotubes

KW - Field emission

KW - Pressure sensors

UR - https://www.scopus.com/pages/publications/33748063977

U2 - 10.1016/j.apsusc.2005.06.029

DO - 10.1016/j.apsusc.2005.06.029

M3 - 文章

AN - SCOPUS:33748063977

SN - 0169-4332

VL - 252

SP - 4198

EP - 4201

JO - Applied Surface Science

JF - Applied Surface Science

IS - 12

ER -

Simulation and fabrication of carbon nanotubes field emission pressure sensors

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