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Ship-in-a-bottle integration by hybrid femtosecond laser technology for fabrication of true 3D biochips

  • Felix Sima
  • , Dong Wu
  • , Jian Xu
  • , Katsumi Midorikawa
  • , Koji Sugioka
  • RIKEN

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

We propose herein the "ship-in-a-bottle" integration of three-dimensional (3D) polymeric sinusoidal ridges inside photosensitive glass microfluidic channel by a hybrid subtractive - additive femtosecond laser processing method. It consists of Femtosecond Laser Assisted Wet Etching (FLAE) of a photosensitive Foturan glass followed by Two-Photon Polymerization (TPP) of a SU-8 negative epoxy-resin. Both subtractive and additive processes are carried out using the same set-up with the change of laser focusing objective only. A 522 nm wavelength of the second harmonic generation from an amplified femtosecond Yb-fiber laser (FCPA μJewel D-400, IMRA America, 1045 nm; pulse width 360 fs, repetition rate 200 kHz) was employed for irradiation. The new method allows lowering the size limit of 3D objects created inside channels to smaller details down to the dimensions of a cell, and improve the structure stability. Sinusoidal periodic patterns and ridges are of great use as base scaffolds for building up new structures on their top or for modulating cell migration, guidance and orientation while created interspaces can be exploited for microfluidic applications. The glass microchannel offers robustness and appropriate dynamic flow conditions for cellular studies while the integrated patterns are reducing the size of structure to the level of cells responsiveness. Taking advantage of the ability to directly fabricate 3D complex shapes, both glass channels and polymeric integrated patterns enable us to 3D spatially design biochips for specific applications.

源语言英语
主期刊名Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
编辑Stephan Roth, Xianfan Xu, Yoshiki Nakata, Beat Neuenschwander
出版商SPIE
ISBN(电子版)9781628414400
DOI
出版状态已出版 - 2015
已对外发布是
活动Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - San Francisco, 美国
期限: 9 2月 2015 → 12 2月 2015

丛书

姓名Proceedings of SPIE - The International Society for Optical Engineering
卷9350
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
国家/地区美国
市San Francisco
时期9/02/15 → 12/02/15

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