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RESET distribution improvement of phase change memory: The impact of pre-programming

  • Yuchan Wang
  • , Xiaogang Chen
  • , Yan Cheng
  • , Xilin Zhou
  • , Shilong Lv
  • , Yifeng Chen
  • , Yueqing Wang
  • , Mi Zhou
  • , Houpeng Chen
  • , Yiyun Zhang
  • , Zhitang Song
  • , Gaoming Feng
  • CAS - Shanghai Institute of Microsystem and Information Technology
  • Semiconductor Manufacturing International Corporation Shanghai

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Some nonvolatile phase change memory (PCM) cells with 80-nm heating electrodes are found very difficult to RESET at 3 mA, which directly affects the RESET distribution of the PCM. The large crystal grains with hexagonal structure in the active phase change area, discovered by transmission electron microscope, are the major reason. One preprogramming testing method is introduced, and the resistance distributions of the PCM cells before and after preprogramming are presented. Results show that the large hexagonal crystal grains have been eliminated, thus the resistance distributions have been greatly improved after preprogramming.

源语言英语
期刊论文编号6767089
页(从-至)536-538
页数3
期刊IEEE Electron Device Letters
卷35
期5
DOI
出版状态已出版 - 5月 2014
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