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Realization of integrated narrow bandpass filters in the infrared region

  • Shao Wei Wang*
  • , Dingquan Liu
  • , Bin Lin
  • , Xiaoshuang Chen
  • , Zhifeng Li
  • , Yan Shi
  • , Wei Wang
  • , Wei Lu
  • *此作品的通讯作者
  • CAS - Shanghai Institute of Technical Physics

科研成果: 期刊稿件文章同行评审

摘要

We demonstrated a high-efficiency technique for the integration of narrow bandpass filters (NBPFs). A filter array integrated with 16 filters on a single substrate has been fabricated by only twice depositing processes. The bandpass of the filters can be tuned widely and range from 2.295 to 2.967 um in this case. The relative full width at half maximum (FWHM) δλ/λ of each filter is less than 0.7%. And the intensity of the bandpass is up to 41.3%.

源语言英语
页(从-至)1677-1683
页数7
期刊International Journal of Infrared and Millimeter Waves
25
11
DOI
出版状态已出版 - 11月 2004
已对外发布

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