PZT thin films derived from a modified sol-gel technique based on acetic acid/water system using a new zirconium source

X. J. Meng; J. G. Cheng; B. Li; J. Tang; H. J. Ye; J. H. Chu

PZT thin films derived from a modified sol-gel technique based on acetic acid/water system using a new zirconium source

X. J. Meng^*
, J. G. Cheng
, B. Li
, J. Tang
, H. J. Ye
, J. H. Chu

^*此作品的通讯作者

CAS - Shanghai Institute of Technical Physics

科研成果: 期刊稿件 › 文章 › 同行评审

6 引用（Scopus）

摘要

The procedure of the synthesis of the precursor solutions and the preparation of the (PZT50/50) thin films on Pt (111)/Ti/SiO₂Si (100) substrates by rapid thermal annealing (RTA) process was reported. Zirconium nitrate was dissolved in acetic acid, and the solution was then cooled to room temperature before the required quantity of titanium butoxide solution was added.

源语言	英语
页（从-至）	1967-1969
页数	3
期刊	Journal of Materials Science Letters
卷	19
期	21
出版状态	已出版 - 11月 2000
已对外发布	是

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引用此

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title = "PZT thin films derived from a modified sol-gel technique based on acetic acid/water system using a new zirconium source",

abstract = "The procedure of the synthesis of the precursor solutions and the preparation of the (PZT50/50) thin films on Pt (111)/Ti/SiO2Si (100) substrates by rapid thermal annealing (RTA) process was reported. Zirconium nitrate was dissolved in acetic acid, and the solution was then cooled to room temperature before the required quantity of titanium butoxide solution was added.",

author = "Meng, \{X. J.\} and Cheng, \{J. G.\} and B. Li and J. Tang and Ye, \{H. J.\} and Chu, \{J. H.\}",

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TY - JOUR

T1 - PZT thin films derived from a modified sol-gel technique based on acetic acid/water system using a new zirconium source

AU - Meng, X. J.

AU - Cheng, J. G.

AU - Li, B.

AU - Tang, J.

AU - Ye, H. J.

AU - Chu, J. H.

PY - 2000/11

Y1 - 2000/11

N2 - The procedure of the synthesis of the precursor solutions and the preparation of the (PZT50/50) thin films on Pt (111)/Ti/SiO2Si (100) substrates by rapid thermal annealing (RTA) process was reported. Zirconium nitrate was dissolved in acetic acid, and the solution was then cooled to room temperature before the required quantity of titanium butoxide solution was added.

AB - The procedure of the synthesis of the precursor solutions and the preparation of the (PZT50/50) thin films on Pt (111)/Ti/SiO2Si (100) substrates by rapid thermal annealing (RTA) process was reported. Zirconium nitrate was dissolved in acetic acid, and the solution was then cooled to room temperature before the required quantity of titanium butoxide solution was added.

UR - https://www.scopus.com/pages/publications/0034319744

M3 - 文章

AN - SCOPUS:0034319744

SN - 0261-8028

VL - 19

SP - 1967

EP - 1969

JO - Journal of Materials Science Letters

JF - Journal of Materials Science Letters

IS - 21

ER -

PZT thin films derived from a modified sol-gel technique based on acetic acid/water system using a new zirconium source

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