Pulsed laser deposited zinc oxide films for surface acoustic wave applications

Y. S. Liu; L. W. Wang; W. Q. Li; J. P. Huang; C. L. Lin

Pulsed laser deposited zinc oxide films for surface acoustic wave applications

Y. S. Liu^*
, L. W. Wang
, W. Q. Li
, J. P. Huang
, C. L. Lin

^*此作品的通讯作者

CAS - Shanghai Institute of Microsystem and Information Technology

科研成果: 期刊稿件 › 文章 › 同行评审

1 引用（Scopus）

摘要

Zinc oxide (ZnO) thin films were deposited on Si (100) by pulsed laser deposition (PLD). XRD, TEM and AFM exhibited the ZnO films were highly c-axis oriented with smooth surface. High resistivity (10⁷ Ω·cm) of the films could be achieved by varying deposition ambient atmosphere or annealing in pure oxygen at high temperature. The results showed that the ZnO films deposited by PLD meet the demands for surface acoustic wave (SAW) devices.

源语言	英语
页（从-至）	78-79+90
期刊	Gongneng Cailiao/Journal of Functional Materials
卷	32
期	1
出版状态	已出版 - 2月 2001
已对外发布	是

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引用此

@article{a1a69bac75e0471889512bb029028f62,

title = "Pulsed laser deposited zinc oxide films for surface acoustic wave applications",

abstract = "Zinc oxide (ZnO) thin films were deposited on Si (100) by pulsed laser deposition (PLD). XRD, TEM and AFM exhibited the ZnO films were highly c-axis oriented with smooth surface. High resistivity (107 Ω·cm) of the films could be achieved by varying deposition ambient atmosphere or annealing in pure oxygen at high temperature. The results showed that the ZnO films deposited by PLD meet the demands for surface acoustic wave (SAW) devices.",

keywords = "PLD, Piezoelectricity, SAW, ZnO",

author = "Liu, \{Y. S.\} and Wang, \{L. W.\} and Li, \{W. Q.\} and Huang, \{J. P.\} and Lin, \{C. L.\}",

year = "2001",

month = feb,

language = "英语",

volume = "32",

pages = "78--79+90",

journal = "Gongneng Cailiao/Journal of Functional Materials",

issn = "1001-9731",

publisher = "Journal of Functional Materials",

number = "1",

}

TY - JOUR

T1 - Pulsed laser deposited zinc oxide films for surface acoustic wave applications

AU - Liu, Y. S.

AU - Wang, L. W.

AU - Li, W. Q.

AU - Huang, J. P.

AU - Lin, C. L.

PY - 2001/2

Y1 - 2001/2

N2 - Zinc oxide (ZnO) thin films were deposited on Si (100) by pulsed laser deposition (PLD). XRD, TEM and AFM exhibited the ZnO films were highly c-axis oriented with smooth surface. High resistivity (107 Ω·cm) of the films could be achieved by varying deposition ambient atmosphere or annealing in pure oxygen at high temperature. The results showed that the ZnO films deposited by PLD meet the demands for surface acoustic wave (SAW) devices.

AB - Zinc oxide (ZnO) thin films were deposited on Si (100) by pulsed laser deposition (PLD). XRD, TEM and AFM exhibited the ZnO films were highly c-axis oriented with smooth surface. High resistivity (107 Ω·cm) of the films could be achieved by varying deposition ambient atmosphere or annealing in pure oxygen at high temperature. The results showed that the ZnO films deposited by PLD meet the demands for surface acoustic wave (SAW) devices.

KW - PLD

KW - Piezoelectricity

KW - SAW

KW - ZnO

UR - https://www.scopus.com/pages/publications/0035242458

M3 - 文章

AN - SCOPUS:0035242458

SN - 1001-9731

VL - 32

SP - 78-79+90

JO - Gongneng Cailiao/Journal of Functional Materials

JF - Gongneng Cailiao/Journal of Functional Materials

IS - 1

ER -

Pulsed laser deposited zinc oxide films for surface acoustic wave applications

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