@inproceedings{10774532a1c54a408cfda11092d7d80b,
title = "Probing and manipulating the interfacial defects of InGaAs dual-layer metal oxides at the atomic scale",
abstract = "The interface between III-V and metal-oxide-semiconductor materials plays a central role in the operation of high-speed electronic devices, such as transistors and light-emitting diodes. The design of high-performance devices requires a detailed understanding of the electronic structure at the interface. However, the relation between the interface state charges to the electrical failure, such as breakdown of the oxide in the transistor remains unknown. Herein, the defect-driven interfacial electron structure of the Ti/ZrO2/Al2O3/InGaAs system are probed and manipulated using a specifically designed in situ transmission electron microscopy experimental method. The interfacial defects induced by oxygen-atom missing is found the main reason for the device failure. This study unearths the fundamental defect-driven interfacial electric structure of III-V semiconductor materials and paves the way to future high-speed and high-reliability devices.",
keywords = "III-V semiconductors, breakdown, in situ transmission electron microscope, inter facial defects, oxygen vacancies",
author = "Xing Wu and Chen Luo and Peng Hao and Tao Sun and Runsheng Wang and Chaolun Wang and Zhigao Hu and Yawei Li and Jian Zhang and Gennadi Bersuker and Litao Sun and Kinleong Pey",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 China Semiconductor Technology International Conference, CSTIC 2018 ; Conference date: 11-03-2018 Through 12-03-2018",
year = "2018",
month = may,
day = "29",
doi = "10.1109/CSTIC.2018.8369288",
language = "英语",
series = "China Semiconductor Technology International Conference 2018, CSTIC 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1--3",
editor = "Hanming Wu and Peilin Song and Qinghuang Lin and Yuchun Wang and Cor Claeys and Hsiang-Lang Lung and Ying Zhang and Steve Liang and Yiyu Shi and Ru Huang and Zhen Guo and Kafai Lai",
booktitle = "China Semiconductor Technology International Conference 2018, CSTIC 2018",
address = "美国",
}