Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr0.5Ti0.5)O3 thick films

S. H. Hu; X. J. Meng; G. J. Hu; J. H. Chu; N. Dai; L. Xu; L. Y. Liu; D. X. Li

doi:10.1063/1.1738178

Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr_0.5Ti_0.5)O₃ thick films

S. H. Hu^*
, X. J. Meng
, G. J. Hu
, J. H. Chu
, N. Dai
, L. Xu
, L. Y. Liu
, D. X. Li

^*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

8 引用（Scopus）

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The growth of metal alkoxide solution-derived Pb(Zr_0.5Ti _0.5)O₃ (PZT) thick films with thickness of 1.5 and 3.7 μm was investigated. The PZT films were prepared on single-crystal SrTiO ₃ substrate by sol-gel process and desired thickness was obtained using multiple steps of spin-coating and annealing process. The structure of the films were investigated by X-ray diffraction and its optical waveguide property was studied using prism-film coupling with a He-Ne laser. It was observed from atomic force microscopy that a crack-free and smooth surface was possessed by the PZT films.

源语言	英语
页（从-至）	3609-3611
页数	3
期刊	Applied Physics Letters
卷	84
期	18
DOI	https://doi.org/10.1063/1.1738178
出版状态	已出版 - 3 5月 2004
已对外发布	是

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abstract = "The growth of metal alkoxide solution-derived Pb(Zr0.5Ti 0.5)O3 (PZT) thick films with thickness of 1.5 and 3.7 μm was investigated. The PZT films were prepared on single-crystal SrTiO 3 substrate by sol-gel process and desired thickness was obtained using multiple steps of spin-coating and annealing process. The structure of the films were investigated by X-ray diffraction and its optical waveguide property was studied using prism-film coupling with a He-Ne laser. It was observed from atomic force microscopy that a crack-free and smooth surface was possessed by the PZT films.",

author = "Hu, \{S. H.\} and Meng, \{X. J.\} and Hu, \{G. J.\} and Chu, \{J. H.\} and N. Dai and L. Xu and Liu, \{L. Y.\} and Li, \{D. X.\}",

year = "2004",

month = may,

day = "3",

doi = "10.1063/1.1738178",

language = "英语",

volume = "84",

pages = "3609--3611",

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TY - JOUR

T1 - Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr0.5Ti0.5)O3 thick films

AU - Hu, S. H.

AU - Meng, X. J.

AU - Hu, G. J.

AU - Chu, J. H.

AU - Dai, N.

AU - Xu, L.

AU - Liu, L. Y.

AU - Li, D. X.

PY - 2004/5/3

Y1 - 2004/5/3

N2 - The growth of metal alkoxide solution-derived Pb(Zr0.5Ti 0.5)O3 (PZT) thick films with thickness of 1.5 and 3.7 μm was investigated. The PZT films were prepared on single-crystal SrTiO 3 substrate by sol-gel process and desired thickness was obtained using multiple steps of spin-coating and annealing process. The structure of the films were investigated by X-ray diffraction and its optical waveguide property was studied using prism-film coupling with a He-Ne laser. It was observed from atomic force microscopy that a crack-free and smooth surface was possessed by the PZT films.

AB - The growth of metal alkoxide solution-derived Pb(Zr0.5Ti 0.5)O3 (PZT) thick films with thickness of 1.5 and 3.7 μm was investigated. The PZT films were prepared on single-crystal SrTiO 3 substrate by sol-gel process and desired thickness was obtained using multiple steps of spin-coating and annealing process. The structure of the films were investigated by X-ray diffraction and its optical waveguide property was studied using prism-film coupling with a He-Ne laser. It was observed from atomic force microscopy that a crack-free and smooth surface was possessed by the PZT films.

UR - https://www.scopus.com/pages/publications/2542466861

U2 - 10.1063/1.1738178

DO - 10.1063/1.1738178

M3 - 文章

AN - SCOPUS:2542466861

SN - 0003-6951

VL - 84

SP - 3609

EP - 3611

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

ER -

Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr0.5Ti0.5)O3 thick films

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Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr_0.5Ti_0.5)O₃ thick films