@inproceedings{c589a84754fd4734811c6dfa95cf46c6,
title = "Piezoelectric Micromachined Ultrasonic Transducers for Ultrasound Imaging",
abstract = "Ultrasound imaging is an effective method for noninvasive examination of both biological and non-biological structures. As the core parts ultrasound imaging, existing medical ultrasound probes consist of bulky piezoelectric ceramics. And the development direction of ultrasonic imaging is decrease in probe volume and increase in resolution. However, it is hard for conventional ultrasound probes to follow this trend. In this report, some novel piezoelectric micromachined ultrasonic transducer (pMUT) arrays for nondestructive evaluation are introduced. And PZT is chosen as the piezoelectric material due to its high piezoelectric coefficient. With the increasing need of medical imaging in health care, these PZT based pMUT arrays have a broad prospect in the future.",
keywords = "PZT, high-density, pMUT, ultrasonic imaging",
author = "Jiang Ling and Wei, \{Yu Hong\} and Jiang, \{Guang Ya\} and Chen, \{Yuan Quan\} and He Tian and Yi Yang and Ren, \{Tian Ling\}",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 IEEE International Conference on Electron Devices and Solid State Circuits, EDSSC 2018 ; Conference date: 06-06-2018 Through 08-06-2018",
year = "2018",
month = oct,
day = "9",
doi = "10.1109/EDSSC.2018.8487075",
language = "英语",
series = "2018 IEEE International Conference on Electron Devices and Solid State Circuits, EDSSC 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2018 IEEE International Conference on Electron Devices and Solid State Circuits, EDSSC 2018",
address = "美国",
}