@inproceedings{b63d6fe1c9164db8a33f425813c3a327,
title = "Performance Optimization of Piezoelectric MEMS Speaker with Cantilever Diaphragm Array",
abstract = "This paper presents the concept to optimize the performance of a piezoelectric MEMS speaker with a cantilever diaphragm array by delicate structure design. The optimization focuses on the dimensions design of each cantilever unit of the array to balance the sound pressure level and frequency range under the condition of a limited area. The optimized design was first proposed based on the simulation and followingly a proof of experiment is conducted by fabricating a piezoelectric cantilever diaphragm array on a SOI wafer. As a result, measurements in the free field illustrate that the maximum SPL of the proposed microspeaker reaches 99 dB in the range of 200 Hz - 20 kHz with 3.0 Vp-p driving voltage.",
keywords = "MEMS, PZT, cantilever array, piezoelectric speaker, simulation",
author = "Yue Fei and Huimin Zhang and Zhourui Liu and Nan Zhang and Xiaofeng Zhou",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024 ; Conference date: 02-05-2024 Through 05-05-2024",
year = "2024",
doi = "10.1109/NEMS60219.2024.10639849",
language = "英语",
series = "2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024",
address = "美国",
}