摘要
In order to improve the infrared detection performance, mesa structures of Mn1.56Co0.96Ni0.48O4/Aluminum/Silicon dioxide/Silicon (MCN/Al/SiO2/Si) were prepared by chemical solution deposition method. Raman spectroscopy results indicate that increasing the thickness causes a change in the Mn3+–O band stretching vibration and the Mn4+–O band bending vibration. Spectroscopic elllipsometry was used to obtain the dielectric function of the films by fitting the experiment data using the classical middle-infrared dispersion formula. The evaluated real part of the dielectric constants ε1 and refractive index n decreased as the wavelength increase, the imaginary part ε2 and extinction coefficient k monotonically increased as the wavelength increase in the entire measuring range of 2–10 μm. The calculated absorption spectra of the MCN/Al/SiO2/Si structure showed that the absorption peak position could be adjusted by varying the thickness of the MCN films. Our results are important in the design and application of MCN film infrared detectors.
| 源语言 | 英语 |
|---|---|
| 文章编号 | 139711 |
| 期刊 | Thin Solid Films |
| 卷 | 768 |
| DOI | |
| 出版状态 | 已出版 - 1 3月 2023 |
| 已对外发布 | 是 |
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