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Nucleation and growth processes during molecular-beam epitaxy of GaAs(001)

  • H. B. Mao*
  • , W. Lu
  • , S. C. Shen
  • *此作品的通讯作者
  • Chinese Academy of Sciences

科研成果: 期刊稿件文章同行评审

摘要

The nucleation and growth processes of GaAs molecular-beam epitaxy were studied by Monte Carlo simulation. The migration of Ga adatoms on the 2 × 4 GaAs (001) surface is anisotropic which has a great effect on the growth kinetics of GaAs. The density of islands and the density of isolated Ga adatoms were obtained for different growth temperatures at first. The island size distribution at low coverage was also studied. Finally, the correlation function between atoms was studied which directly shows the great anisotropy of the growth process. The correlation function shows that the Ga adatoms are depleted around islands.

源语言英语
页(从-至)31-37
页数7
期刊Journal of Crystal Growth
151
1-2
DOI
出版状态已出版 - 2 5月 1995
已对外发布

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