@inproceedings{7ebd141b1fc841aeb847662add0c7faa,
title = "Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser",
abstract = "Microelectric components and microfluidic structures are monolithically integrated in a glass substrate by a femtosecond laser. The fabricated microchips are used as microheaters to control the temperature of in-channel fluids.",
author = "Jian Xu and Dong Wu and Sizhu Wu and Koji Sugioka and Katsumi Midorikawa",
year = "2013",
doi = "10.1109/CLEOPR.2013.6600019",
language = "英语",
isbn = "9781467364751",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
booktitle = "2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013",
note = "10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 ; Conference date: 30-06-2013 Through 04-07-2013",
}