TY - GEN
T1 - Investigation of inner surface of silicon microchannels fabricated by electrochemical method
AU - Ci, Pengliang
AU - Shi, Jing
AU - Sun, Li
AU - Liu, Tao
AU - Wang, Lianwei
AU - Chu, Paul K.
PY - 2010
Y1 - 2010
N2 - Various silicon-based microchannels with different internal surface morphology is investigated to grow CNTs (carbon nanotubes) on the surface of the pore wall which may enhance the electron emission. The morphology of the samples prepared under different conditions is determined by scanning electron microscopy (SEM). Parameters such as temperature, concentration of hydrofluoric acid, potential, current density, and so on are found to affect the inner surface of the pore wall.
AB - Various silicon-based microchannels with different internal surface morphology is investigated to grow CNTs (carbon nanotubes) on the surface of the pore wall which may enhance the electron emission. The morphology of the samples prepared under different conditions is determined by scanning electron microscopy (SEM). Parameters such as temperature, concentration of hydrofluoric acid, potential, current density, and so on are found to affect the inner surface of the pore wall.
UR - https://www.scopus.com/pages/publications/77951664992
U2 - 10.1109/INEC.2010.5424440
DO - 10.1109/INEC.2010.5424440
M3 - 会议稿件
AN - SCOPUS:77951664992
SN - 9781424435449
T3 - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
SP - 396
EP - 397
BT - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
T2 - 2010 3rd International Nanoelectronics Conference, INEC 2010
Y2 - 3 January 2010 through 8 January 2010
ER -