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Infrared spectroscopic ellipsometry on ferroelectric thin films and narrow gap semiconductors

  • Junhao Chu*
  • , Zhiming Huang
  • *此作品的通讯作者

科研成果: 期刊稿件会议文章同行评审

摘要

A type of high accuracy infrared spectroscopic ellipsometer, by fixed polarizer, rotating polarizer, sample and fixed analyzer PPr(co)SA. has been designed and constructed to study the optical properties of infrared materials in the 2.5 - 12.5 μm wavelength range. The ellipsometric parameters Ψ and Δ can be derived directly from the detected signal by two ac components with the frequencies of 2 ω and 4ω, avoiding measuring the dc component in addition. The system operations, including data acquisition and reduction, pre-amplifier gain control, incident angle, as well as wavelength setting and scanning, were fully and automatically controlled by a computer. The accuracy in straight-through is better than 1% on tanΨ and cosΔ without any defect correction of instrumental elements, which is quite good for the infrared optical constants measurements. Some typical applications on ferroelectric thin films PZT and BST and narrow gap semiconductors Hg1-xCdxTe are presented.

源语言英语
页(从-至)44-51
页数8
期刊Proceedings of SPIE - The International Society for Optical Engineering
4795
DOI
出版状态已出版 - 2002
已对外发布
活动Materials for Infrared Detectors II - Seattle, WA, 美国
期限: 8 7月 20029 7月 2002

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