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Infrared dielectric properties of BaTiO3 ultrathin films

  • S. J. Liu
  • , X. Y. Zhao
  • , G. Pan
  • , G. F. Su
  • , Z. M. Huang
  • , J. H. Chu
  • Shanghai Normal University
  • CAS - Shanghai Institute of Technical Physics

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Using high accurate infrared spectroscopic ellipsometry, the infrared dielectric constants of BaTiO3 ultrathin films are obtained in the temperature ranging from 20 to 150°C, which were deposited on Pt-Ti-SiO 2-Si substrate by radio frequency magnetron sputtering. The high frequency dielectric function of the BaTiO3 ultrathin films shows the temperature dependence from the tetragonal to the cubic phase transition. The results suggest that the temperature dependence of the BaTiO3 ultrathin films' infrared dielectric properties should be considered in the technological applications and theoretical investigations.

源语言英语
主期刊名Sixth International Conference on Thin Film Physics and Applications
DOI
出版状态已出版 - 2008
已对外发布
活动6th International Conference on Thin Film Physics and Applications, TFPA 2007 - Shanghai, 中国
期限: 25 9月 200728 9月 2007

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
6984
ISSN(印刷版)0277-786X

会议

会议6th International Conference on Thin Film Physics and Applications, TFPA 2007
国家/地区中国
Shanghai
时期25/09/0728/09/07

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