High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

Yuanxin Tan; Zhaohui Wang; Wei Chu; Yang Liao; Lingling Qiao; Ya Cheng

doi:10.1364/OME.6.003787

High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

Yuanxin Tan
, Zhaohui Wang
, Wei Chu
, Yang Liao
, Lingling Qiao
, Ya Cheng^*

^*此作品的通讯作者

物理与电子科学学院

CAS - Shanghai Institute of Optics and Fine Mechanics
ShanghaiTech University
AVIC

科研成果: 期刊稿件 › 文章 › 同行评审

18 引用（Scopus）

摘要

We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 μm.

源语言	英语
页（从-至）	3787-3793
页数	7
期刊	Optical Materials Express
卷	6
期	12
DOI	https://doi.org/10.1364/OME.6.003787
出版状态	已出版 - 2016

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title = "High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions",

abstract = "We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of \textasciitilde{}100 μm.",

author = "Yuanxin Tan and Zhaohui Wang and Wei Chu and Yang Liao and Lingling Qiao and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2016 Optical Society of America.",

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language = "英语",

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T1 - High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

AU - Tan, Yuanxin

AU - Wang, Zhaohui

AU - Chu, Wei

AU - Liao, Yang

AU - Qiao, Lingling

AU - Cheng, Ya

PY - 2016

Y1 - 2016

N2 - We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 μm.

AB - We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 μm.

UR - https://www.scopus.com/pages/publications/85007165285

U2 - 10.1364/OME.6.003787

DO - 10.1364/OME.6.003787

M3 - 文章

AN - SCOPUS:85007165285

SN - 2159-3930

VL - 6

SP - 3787

EP - 3793

JO - Optical Materials Express

JF - Optical Materials Express

IS - 12

ER -

High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

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