High performance materials processing using tailored femtosecond laser pulses

Koji Sugioka; Katsumi Midorikawa; Fei He; Ya Cheng

doi:10.1109/CLEOPR.2015.7375984

High performance materials processing using tailored femtosecond laser pulses

Koji Sugioka
, Katsumi Midorikawa
, Fei He
, Ya Cheng

RIKEN
CAS - Shanghai Institute of Optics and Fine Mechanics

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.

源语言	英语
主期刊名	2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
出版商	Institute of Electrical and Electronics Engineers Inc.
ISBN（电子版）	9781467371094
DOI	https://doi.org/10.1109/CLEOPR.2015.7375984
出版状态	已出版 - 7 1月 2016
已对外发布	是
活动	11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 - Busan, 韩国期限: 24 8月 2015 → 28 8月 2015

出版系列

姓名	2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
卷	2

会议

会议	11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
国家/地区	韩国
市	Busan
时期	24/08/15 → 28/08/15

访问文件

10.1109/CLEOPR.2015.7375984

其它文件与链接

链接到 Scopus 的出版物

引用此

Sugioka, K., Midorikawa, K., He, F., & Cheng, Y. (2016). High performance materials processing using tailored femtosecond laser pulses. 在 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 文章 7375984 (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015; 卷 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2015.7375984

@inproceedings{11018d69367b47eca58a47e305ca74eb,

title = "High performance materials processing using tailored femtosecond laser pulses",

abstract = "Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.",

author = "Koji Sugioka and Katsumi Midorikawa and Fei He and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 ; Conference date: 24-08-2015 Through 28-08-2015",

year = "2016",

month = jan,

day = "7",

doi = "10.1109/CLEOPR.2015.7375984",

language = "英语",

series = "2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015",

address = "美国",

}

Sugioka, K, Midorikawa, K, He, F & Cheng, Y 2016, High performance materials processing using tailored femtosecond laser pulses. 在 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015., 7375984, 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015, 卷 2, Institute of Electrical and Electronics Engineers Inc., 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015, Busan, 韩国, 24/08/15. https://doi.org/10.1109/CLEOPR.2015.7375984

High performance materials processing using tailored femtosecond laser pulses. / Sugioka, Koji; Midorikawa, Katsumi; He, Fei 等.
2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015. Institute of Electrical and Electronics Engineers Inc., 2016. 7375984 (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015; 卷 2).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - High performance materials processing using tailored femtosecond laser pulses

AU - Sugioka, Koji

AU - Midorikawa, Katsumi

AU - He, Fei

AU - Cheng, Ya

PY - 2016/1/7

Y1 - 2016/1/7

N2 - Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.

AB - Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.

UR - https://www.scopus.com/pages/publications/84964030247

U2 - 10.1109/CLEOPR.2015.7375984

DO - 10.1109/CLEOPR.2015.7375984

M3 - 会议稿件

AN - SCOPUS:84964030247

T3 - 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

BT - 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

Y2 - 24 August 2015 through 28 August 2015

ER -

Sugioka K, Midorikawa K, He F, Cheng Y. High performance materials processing using tailored femtosecond laser pulses. 在 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015. Institute of Electrical and Electronics Engineers Inc. 2016. 7375984. (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015). doi: 10.1109/CLEOPR.2015.7375984

High performance materials processing using tailored femtosecond laser pulses

摘要

出版系列

会议

访问文件

其它文件与链接

指纹

引用此