High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)

Jian Liu; Youting Liang; Lang Gao; Chao Sun; Jianglin Guan; Zhe Wang; Zhaoxiang Liu; Zhiwei Fang; Min Wang; Haisu Zhang; Ya Cheng

doi:10.3390/nano14171466

High-Extraction-Rate Ta₂O₅-Core/SiO₂-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)

Jian Liu
, Youting Liang
, Lang Gao
, Chao Sun
, Jianglin Guan
, Zhe Wang
, Zhaoxiang Liu
, Zhiwei Fang
, Min Wang
, Haisu Zhang^*
, Ya Cheng^*

^*此作品的通讯作者

物理与电子科学学院

East China Normal University
CAS - Shanghai Institute of Optics and Fine Mechanics
Shanxi University
Shandong Normal University
Hefei National Laboratory
Shanghai Research Center for Quantum Sciences

科研成果: 期刊稿件 › 文章 › 同行评审

4 引用（Scopus）

摘要

We demonstrate high-extraction-rate Ta₂O₅-core/SiO₂-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta₂O₅ waveguides have shown the quality factors to be above 10⁵ near 1550 nm. The demonstrated Ta₂O₅ waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.

源语言	英语
文章编号	1466
期刊	Nanomaterials
卷	14
期	17
DOI	https://doi.org/10.3390/nano14171466
出版状态	已出版 - 9月 2024

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10.3390/nano14171466

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引用此

@article{741935f4f1464d418a61d675fa95d2ca,

title = "High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)",

abstract = "We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70\% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta2O5 waveguides have shown the quality factors to be above 105 near 1550 nm. The demonstrated Ta2O5 waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.",

keywords = "femtosecond laser direct writing, high extraction rate, low scattering loss, microring resonator, tantalum pentoxide",

author = "Jian Liu and Youting Liang and Lang Gao and Chao Sun and Jianglin Guan and Zhe Wang and Zhaoxiang Liu and Zhiwei Fang and Min Wang and Haisu Zhang and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2024 by the authors.",

year = "2024",

month = sep,

doi = "10.3390/nano14171466",

language = "英语",

volume = "14",

journal = "Nanomaterials",

issn = "2079-4991",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "17",

}

TY - JOUR

T1 - High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)

AU - Liu, Jian

AU - Liang, Youting

AU - Gao, Lang

AU - Sun, Chao

AU - Guan, Jianglin

AU - Wang, Zhe

AU - Liu, Zhaoxiang

AU - Fang, Zhiwei

AU - Wang, Min

AU - Zhang, Haisu

AU - Cheng, Ya

PY - 2024/9

Y1 - 2024/9

N2 - We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta2O5 waveguides have shown the quality factors to be above 105 near 1550 nm. The demonstrated Ta2O5 waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.

AB - We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta2O5 waveguides have shown the quality factors to be above 105 near 1550 nm. The demonstrated Ta2O5 waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.

KW - femtosecond laser direct writing

KW - high extraction rate

KW - low scattering loss

KW - microring resonator

KW - tantalum pentoxide

UR - https://www.scopus.com/pages/publications/85203683153

U2 - 10.3390/nano14171466

DO - 10.3390/nano14171466

M3 - 文章

AN - SCOPUS:85203683153

SN - 2079-4991

VL - 14

JO - Nanomaterials

JF - Nanomaterials

IS - 17

M1 - 1466

ER -

High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)

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High-Extraction-Rate Ta₂O₅-Core/SiO₂-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)