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Growth of flake-like diamond crystal using polymer precursor

  • Z. Sun*
  • , X. Shi
  • , B. K. Tay
  • , X. Wang
  • , Y. Sun
  • *此作品的通讯作者

科研成果: 期刊稿件文章同行评审

摘要

Using phenylcarbyne polymer as a precursor, flake-like diamond crystals can be grown by conventional hot filament chemical vapor deposition system (HF-CVD) in methane and hydrogen mixture. The flake-like diamond crystals which show two dimensional (layer by layer) growth features formed in the temperature range of 500°C to 700°C. The large flattened diamond crystals several tens of micrometers in size have been observed. It is proposed that a single crystalline diamond layer formed using polymer precursor in the initial nucleation process, followed by homo-epitaxial growth resulting in the formation of single crystalline diamond thin film.

源语言英语
页(从-至)159-162
页数4
期刊Thin Solid Films
308-309
1-4
DOI
出版状态已出版 - 31 10月 1997
已对外发布

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