摘要
Using phenylcarbyne polymer as a precursor, flake-like diamond crystals can be grown by conventional hot filament chemical vapor deposition system (HF-CVD) in methane and hydrogen mixture. The flake-like diamond crystals which show two dimensional (layer by layer) growth features formed in the temperature range of 500°C to 700°C. The large flattened diamond crystals several tens of micrometers in size have been observed. It is proposed that a single crystalline diamond layer formed using polymer precursor in the initial nucleation process, followed by homo-epitaxial growth resulting in the formation of single crystalline diamond thin film.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | 159-162 |
| 页数 | 4 |
| 期刊 | Thin Solid Films |
| 卷 | 308-309 |
| 期 | 1-4 |
| DOI | |
| 出版状态 | 已出版 - 31 10月 1997 |
| 已对外发布 | 是 |
指纹
探究 'Growth of flake-like diamond crystal using polymer precursor' 的科研主题。它们共同构成独一无二的指纹。引用此
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