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Flexible thermistors for far infrared detection: MCNO films with low resistivity and high TCR deposited on flexible organic sheets

  • CAS - Shanghai Institute of Technical Physics

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

MCNO flexible thermistors have been fabricated on polyethylene terephthalate or polyimide sheets by RF magnetron sputtering method at room temperature. The whole fabricating processes have been done at room temperature. The temperature coefficient of resistance is -3.1% and resistivity as low as 110Ωcm at 295K. Due to the heat-treat free process, high TCR and moderate resistivity features, the technique we provide here allows a convenient and low cost industrial manufacture of high performance flexible thermistors and wide band infrared detectors.

源语言英语
主期刊名2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017
出版商IEEE Computer Society
ISBN(电子版)9781509060481
DOI
出版状态已出版 - 12 10月 2017
已对外发布
活动42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017 - Cancun, Quintana Roo, 墨西哥
期限: 27 8月 20171 9月 2017

出版系列

姓名International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
ISSN(印刷版)2162-2027
ISSN(电子版)2162-2035

会议

会议42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017
国家/地区墨西哥
Cancun, Quintana Roo
时期27/08/171/09/17

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