Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

Y. J. Li; S. P. Lau; B. K. Tay; Z. Sun; G. Y. Chen; J. S. Chen; X. Z. Ding

doi:10.1116/1.1372918

Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

Y. J. Li^*
, S. P. Lau
, B. K. Tay
, Z. Sun
, G. Y. Chen
, J. S. Chen
, X. Z. Ding

^*此作品的通讯作者

Nanyang Technological University

科研成果: 期刊稿件 › 会议文章 › 同行评审

3 引用（Scopus）

摘要

The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.

源语言	英语
页（从-至）	950-953
页数	4
期刊	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
卷	19
期	3
DOI	https://doi.org/10.1116/1.1372918
出版状态	已出版 - 5月 2001
已对外发布	是
活动	13th International Vaccum Microelectronics Conference - Guangzhou, 中国期限: 14 8月 2000 → 17 8月 2000

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title = "Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate",

abstract = "The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.",

author = "Li, \{Y. J.\} and Lau, \{S. P.\} and Tay, \{B. K.\} and Z. Sun and Chen, \{G. Y.\} and Chen, \{J. S.\} and Ding, \{X. Z.\}",

year = "2001",

month = may,

doi = "10.1116/1.1372918",

language = "英语",

volume = "19",

pages = "950--953",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

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number = "3",

note = "13th International Vaccum Microelectronics Conference ; Conference date: 14-08-2000 Through 17-08-2000",

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TY - JOUR

T1 - Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

AU - Li, Y. J.

AU - Lau, S. P.

AU - Tay, B. K.

AU - Sun, Z.

AU - Chen, G. Y.

AU - Chen, J. S.

AU - Ding, X. Z.

PY - 2001/5

Y1 - 2001/5

N2 - The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.

AB - The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.

UR - https://www.scopus.com/pages/publications/0035326367

U2 - 10.1116/1.1372918

DO - 10.1116/1.1372918

M3 - 会议文章

AN - SCOPUS:0035326367

SN - 1071-1023

VL - 19

SP - 950

EP - 953

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

T2 - 13th International Vaccum Microelectronics Conference

Y2 - 14 August 2000 through 17 August 2000

ER -

Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

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