Femtosecond laser micro/nanomachining of glass materials for ptofluidic applications and beyond

We report on the fabrication of various types of microand ano-scale functional structures, such as microoptical, icrofluidic, and microelectronic components, n glass materials using femtosecond laser micro/nanomachining. We show that high-aspect-ratio microfluidic hannels and micro-optical lenses can be abricated on the fused silica substrate for constructing integrated optofluidic micro-systems, and microelectrodes can be formed in dielectric materials for ncorporating electro-optical functions into the hotonic and optofluidic micro-systems. Thus, emtosecond laser micro/nanomachining will open up broad spectrum of opportunities in the optofluidic nd optoelectronic applications.