Fabrication of ultra-high-Q Ta2O5 microdisk by photolithography assisted chemo-mechanical etching

Renhong Gao; Minghui Li; Guanghui Zhao; Jintian Lin; Jianglin Guan; Chuntao Li; Min Wang; Lingling Qiao; Ya Cheng

Fabrication of ultra-high-Q Ta₂O₅ microdisk by photolithography assisted chemo-mechanical etching

Renhong Gao
, Minghui Li
, Guanghui Zhao
, Jintian Lin
, Jianglin Guan
, Chuntao Li
, Min Wang
, Lingling Qiao
, Ya Cheng^*

^*此作品的通讯作者

物理与电子科学学院

East China Normal University
CAS - Shanghai Institute of Optics and Fine Mechanics

科研成果: 会议稿件 › 论文 › 同行评审

摘要

High-Q whispering gallery modes (WGMs) microdisks on amorphous Ta₂O₅ films are fabricated by femtosecond laser photolithography assisted chemo-mechanical etching. The loaded Q factor of the microresonator with a diameter of 120 μm reaches 1.92×10⁶

源语言	英语
出版状态	已出版 - 2024
活动	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, 韩国期限: 4 8月 2024 → 8 8月 2024

会议

会议	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024
国家/地区	韩国
市	Incheon
时期	4/08/24 → 8/08/24

其它文件与链接

链接到 Scopus 的出版物

引用此

@conference{5816c0c094004aeb92796749dfa2fb3c,

title = "Fabrication of ultra-high-Q Ta2O5 microdisk by photolithography assisted chemo-mechanical etching",

abstract = "High-Q whispering gallery modes (WGMs) microdisks on amorphous Ta2O5 films are fabricated by femtosecond laser photolithography assisted chemo-mechanical etching. The loaded Q factor of the microresonator with a diameter of 120 μm reaches 1.92×106",

author = "Renhong Gao and Minghui Li and Guanghui Zhao and Jintian Lin and Jianglin Guan and Chuntao Li and Min Wang and Lingling Qiao and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2024 The Author(s); 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 ; Conference date: 04-08-2024 Through 08-08-2024",

year = "2024",

language = "英语",

}

TY - CONF

T1 - Fabrication of ultra-high-Q Ta2O5 microdisk by photolithography assisted chemo-mechanical etching

AU - Gao, Renhong

AU - Li, Minghui

AU - Zhao, Guanghui

AU - Lin, Jintian

AU - Guan, Jianglin

AU - Li, Chuntao

AU - Wang, Min

AU - Qiao, Lingling

AU - Cheng, Ya

PY - 2024

Y1 - 2024

N2 - High-Q whispering gallery modes (WGMs) microdisks on amorphous Ta2O5 films are fabricated by femtosecond laser photolithography assisted chemo-mechanical etching. The loaded Q factor of the microresonator with a diameter of 120 μm reaches 1.92×106

AB - High-Q whispering gallery modes (WGMs) microdisks on amorphous Ta2O5 films are fabricated by femtosecond laser photolithography assisted chemo-mechanical etching. The loaded Q factor of the microresonator with a diameter of 120 μm reaches 1.92×106

UR - https://www.scopus.com/pages/publications/85216112017

M3 - 论文

AN - SCOPUS:85216112017

T2 - 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024

Y2 - 4 August 2024 through 8 August 2024

ER -

Fabrication of ultra-high-Q Ta2O5 microdisk by photolithography assisted chemo-mechanical etching

摘要

会议

其它文件与链接

指纹

引用此

Fabrication of ultra-high-Q Ta₂O₅ microdisk by photolithography assisted chemo-mechanical etching