Fabrication of three-dimensional microfluidic channels inside glass using nanosecond laser direct writing

Changning Liu; Yang Liao; Fei He; Yinglong Shen; Danping Chen; Ya Cheng; Zhizhan Xu; Koji Sugioka; Katsumi Midorikawa

doi:10.1364/OE.20.004291

Fabrication of three-dimensional microfluidic channels inside glass using nanosecond laser direct writing

Changning Liu^*
, Yang Liao
, Fei He
, Yinglong Shen
, Danping Chen
, Ya Cheng
, Zhizhan Xu
, Koji Sugioka
, Katsumi Midorikawa

^*此作品的通讯作者

CAS - Shanghai Institute of Optics and Fine Mechanics
University of Chinese Academy of Sciences
RIKEN

科研成果: 期刊稿件 › 文章 › 同行评审

23 引用（Scopus）

摘要

We show that fabrication of three-dimensional microfluidic channels embedded in glass can be achieved by using a Q-switched, frequency-doubled Nd:YAG laser. The processing mainly consists of two steps: (1) formation of hollow microfluidic channels in porous glass immersed in Rhodamine 6G dissolved in water by nanosecond laser ablation; and (2) postannealing of the fabricated porous glass sample at 1120 °C for consolidation of the sample. In particular, a bilayer microfluidic structure is created in glass substrate using this technique for showcasing its capability of three-dimensional structuring.

源语言	英语
页（从-至）	4291-4296
页数	6
期刊	Optics Express
卷	20
期	4
DOI	https://doi.org/10.1364/OE.20.004291
出版状态	已出版 - 13 2月 2012
已对外发布	是

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abstract = "We show that fabrication of three-dimensional microfluidic channels embedded in glass can be achieved by using a Q-switched, frequency-doubled Nd:YAG laser. The processing mainly consists of two steps: (1) formation of hollow microfluidic channels in porous glass immersed in Rhodamine 6G dissolved in water by nanosecond laser ablation; and (2) postannealing of the fabricated porous glass sample at 1120 °C for consolidation of the sample. In particular, a bilayer microfluidic structure is created in glass substrate using this technique for showcasing its capability of three-dimensional structuring.",

author = "Changning Liu and Yang Liao and Fei He and Yinglong Shen and Danping Chen and Ya Cheng and Zhizhan Xu and Koji Sugioka and Katsumi Midorikawa",

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T1 - Fabrication of three-dimensional microfluidic channels inside glass using nanosecond laser direct writing

AU - Liu, Changning

AU - Liao, Yang

AU - He, Fei

AU - Shen, Yinglong

AU - Chen, Danping

AU - Cheng, Ya

AU - Xu, Zhizhan

AU - Sugioka, Koji

AU - Midorikawa, Katsumi

PY - 2012/2/13

Y1 - 2012/2/13

N2 - We show that fabrication of three-dimensional microfluidic channels embedded in glass can be achieved by using a Q-switched, frequency-doubled Nd:YAG laser. The processing mainly consists of two steps: (1) formation of hollow microfluidic channels in porous glass immersed in Rhodamine 6G dissolved in water by nanosecond laser ablation; and (2) postannealing of the fabricated porous glass sample at 1120 °C for consolidation of the sample. In particular, a bilayer microfluidic structure is created in glass substrate using this technique for showcasing its capability of three-dimensional structuring.

AB - We show that fabrication of three-dimensional microfluidic channels embedded in glass can be achieved by using a Q-switched, frequency-doubled Nd:YAG laser. The processing mainly consists of two steps: (1) formation of hollow microfluidic channels in porous glass immersed in Rhodamine 6G dissolved in water by nanosecond laser ablation; and (2) postannealing of the fabricated porous glass sample at 1120 °C for consolidation of the sample. In particular, a bilayer microfluidic structure is created in glass substrate using this technique for showcasing its capability of three-dimensional structuring.

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DO - 10.1364/OE.20.004291

M3 - 文章

AN - SCOPUS:84863134068

SN - 1094-4087

VL - 20

SP - 4291

EP - 4296

JO - Optics Express

JF - Optics Express

IS - 4

ER -

Fabrication of three-dimensional microfluidic channels inside glass using nanosecond laser direct writing

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