Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

We report on fabrication of on-chip calcium fluoride (CaF₂) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q) factors of the fabricated microresonators are measured to be 4.2 × 10⁴ at wavelengths near 1,550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.