@inproceedings{780057c3718b43e2b8c9d0580b1d0fdc,
title = "Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications",
abstract = "We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing great potential of using these microoptical lenses in lab-on-a-chip applications.",
author = "Y. Cheng and Tsai, \{H. L.\}",
year = "2006",
language = "英语",
isbn = "0791837904",
series = "American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD",
publisher = "American Society of Mechanical Engineers (ASME)",
booktitle = "Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Heat Transfer",
address = "美国",
note = "2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 ; Conference date: 05-11-2006 Through 10-11-2006",
}