Fabrication of multielement arrays based on high-Tc superconducting microbolometers

Xintian Liu; Z. H. Liu; Yong Chang; Junhao Chu

doi:10.1117/12.408315

Fabrication of multielement arrays based on high-T_c superconducting microbolometers

Xintian Liu
, Z. H. Liu
, Yong Chang
, Junhao Chu

CAS - Shanghai Institute of Technical Physics

科研成果: 期刊稿件 › 会议文章 › 同行评审

1 引用（Scopus）

摘要

The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D∗ for various bolometric elements are ranged from 1.2 X 10⁸ to 7.2 X 10⁸ cmHz^1/2w^-1 at the operating temperature approximately 88 K.

源语言	英语
页（从-至）	532-534
页数	3
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	4086
DOI	https://doi.org/10.1117/12.408315
出版状态	已出版 - 2000
已对外发布	是
活动	4th International Conference on Thin Film Physics and Applications - Shanghai, 中国期限: 8 5月 2000 → 11 5月 2000

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10.1117/12.408315

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title = "Fabrication of multielement arrays based on high-Tc superconducting microbolometers",

abstract = "The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D∗ for various bolometric elements are ranged from 1.2 X 108 to 7.2 X 108 cmHz1/2w-1 at the operating temperature approximately 88 K.",

keywords = "Detector, Superconductor",

author = "Xintian Liu and Liu, \{Z. H.\} and Yong Chang and Junhao Chu",

note = "Publisher Copyright: {\textcopyright} 200 COPYRIGHT SPIE.; 4th International Conference on Thin Film Physics and Applications ; Conference date: 08-05-2000 Through 11-05-2000",

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TY - JOUR

T1 - Fabrication of multielement arrays based on high-Tc superconducting microbolometers

AU - Liu, Xintian

AU - Liu, Z. H.

AU - Chang, Yong

AU - Chu, Junhao

N1 - Publisher Copyright: © 200 COPYRIGHT SPIE.

PY - 2000

Y1 - 2000

N2 - The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D∗ for various bolometric elements are ranged from 1.2 X 108 to 7.2 X 108 cmHz1/2w-1 at the operating temperature approximately 88 K.

AB - The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D∗ for various bolometric elements are ranged from 1.2 X 108 to 7.2 X 108 cmHz1/2w-1 at the operating temperature approximately 88 K.

KW - Detector

KW - Superconductor

UR - https://www.scopus.com/pages/publications/84883871705

U2 - 10.1117/12.408315

DO - 10.1117/12.408315

M3 - 会议文章

AN - SCOPUS:84883871705

SN - 0277-786X

VL - 4086

SP - 532

EP - 534

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - 4th International Conference on Thin Film Physics and Applications

Y2 - 8 May 2000 through 11 May 2000

ER -

Fabrication of multielement arrays based on high-Tc superconducting microbolometers

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Fabrication of multielement arrays based on high-T_c superconducting microbolometers