Fabrication of microfluidic chips and integrated optofluidic devices in glass by femtosecond laser direct writing

Ya Cheng; Koji Sugioka

Fabrication of microfluidic chips and integrated optofluidic devices in glass by femtosecond laser direct writing

Ya Cheng^*
, Koji Sugioka

^*此作品的通讯作者

CAS - Shanghai Institute of Optics and Fine Mechanics
RIKEN

科研成果: 书/报告/会议事项章节 › 章节 › 同行评审

摘要

Integrated optofluidic devices or microsystems are highly functional miniaturized devices composed of microfluidic and micro-optical components synergistically combined wiTheach other. They have found important applications in chemical sensing, biosensing, and reconfigurable photonics. This chapter describes the principles and techniques for fabricating microfluidic chips and integrated optofluidic devices in glass by femtosecond laser direct writing. It then gives a few examples of successful applications of fabricated devices. Major challenges and opportunities are also discussed.

源语言	英语
主期刊名	Ultrafast Laser Processing
主期刊副标题	From Micro-to Nanoscale
出版商	Pan Stanford Publishing Pte. Ltd.
页	489-518
页数	30
ISBN（电子版）	9789814303699
ISBN（印刷版）	9789814267335
出版状态	已出版 - 1 1月 2013
已对外发布	是

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AB - Integrated optofluidic devices or microsystems are highly functional miniaturized devices composed of microfluidic and micro-optical components synergistically combined wiTheach other. They have found important applications in chemical sensing, biosensing, and reconfigurable photonics. This chapter describes the principles and techniques for fabricating microfluidic chips and integrated optofluidic devices in glass by femtosecond laser direct writing. It then gives a few examples of successful applications of fabricated devices. Major challenges and opportunities are also discussed.

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Fabrication of microfluidic chips and integrated optofluidic devices in glass by femtosecond laser direct writing

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