Fabrication of IR reflectors by porous silicon technique

Zhejin Wang; Lianwei Wang; Yuxiang Zheng; Xiaoshuang Chen

doi:10.1109/ICSICT.2006.306645

Fabrication of IR reflectors by porous silicon technique

Zhejin Wang^*
, Lianwei Wang
, Yuxiang Zheng
, Xiaoshuang Chen

^*此作品的通讯作者

物理与电子科学学院

East China Normal University
Fudan University
Chinese Academy of Sciences

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated.

源语言	英语
主期刊名	ICSICT-2006
主期刊副标题	2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings
出版商	IEEE Computer Society
页	1010-1012
页数	3
ISBN（印刷版）	1424401615, 9781424401611
DOI	https://doi.org/10.1109/ICSICT.2006.306645
出版状态	已出版 - 2006
活动	ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology - Shanghai, 中国期限: 23 10月 2006 → 26 10月 2006

出版系列

姓名	ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

会议

会议	ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology
国家/地区	中国
市	Shanghai
时期	23/10/06 → 26/10/06

访问文件

10.1109/ICSICT.2006.306645

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引用此

Wang, Z., Wang, L., Zheng, Y., & Chen, X. (2006). Fabrication of IR reflectors by porous silicon technique. 在 ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings (页码 1010-1012). 文章 4098306 (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings). IEEE Computer Society. https://doi.org/10.1109/ICSICT.2006.306645

Wang, Zhejin ; Wang, Lianwei ; Zheng, Yuxiang 等. / Fabrication of IR reflectors by porous silicon technique. ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society, 2006. 页码 1010-1012 (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

@inproceedings{1c3345d756134f0b913a36de957c0e68,

title = "Fabrication of IR reflectors by porous silicon technique",

abstract = "Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated.",

author = "Zhejin Wang and Lianwei Wang and Yuxiang Zheng and Xiaoshuang Chen",

year = "2006",

doi = "10.1109/ICSICT.2006.306645",

language = "英语",

isbn = "1424401615",

series = "ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings",

publisher = "IEEE Computer Society",

pages = "1010--1012",

booktitle = "ICSICT-2006",

address = "美国",

note = "ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology ; Conference date: 23-10-2006 Through 26-10-2006",

}

Wang, Z, Wang, L, Zheng, Y & Chen, X 2006, Fabrication of IR reflectors by porous silicon technique. 在 ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings., 4098306, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings, IEEE Computer Society, 页码 1010-1012, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Shanghai, 中国, 23/10/06. https://doi.org/10.1109/ICSICT.2006.306645

Fabrication of IR reflectors by porous silicon technique. / Wang, Zhejin; Wang, Lianwei; Zheng, Yuxiang 等.
ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society, 2006. 页码 1010-1012 4098306 (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Fabrication of IR reflectors by porous silicon technique

AU - Wang, Zhejin

AU - Wang, Lianwei

AU - Zheng, Yuxiang

AU - Chen, Xiaoshuang

PY - 2006

Y1 - 2006

N2 - Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated.

AB - Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated.

UR - https://www.scopus.com/pages/publications/34547251546

U2 - 10.1109/ICSICT.2006.306645

DO - 10.1109/ICSICT.2006.306645

M3 - 会议稿件

AN - SCOPUS:34547251546

SN - 1424401615

SN - 9781424401611

T3 - ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

SP - 1010

EP - 1012

BT - ICSICT-2006

PB - IEEE Computer Society

T2 - ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology

Y2 - 23 October 2006 through 26 October 2006

ER -

Wang Z, Wang L, Zheng Y, Chen X. Fabrication of IR reflectors by porous silicon technique. 在 ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society. 2006. 页码 1010-1012. 4098306. (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings). doi: 10.1109/ICSICT.2006.306645

Fabrication of IR reflectors by porous silicon technique

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