@inproceedings{87d13e7e7ca646ecbe3e70a81237a082,
title = "Fabrication of functional micro-and nanofluidics embedded in glass using femtosecond laser microprocessing",
abstract = "We resolve long-standing difficulties in fabrication of large-scale 3D microfluidics and demonstrate fabrication of nanochannels of a width of ∼40 nm (∼1/20 of writing beam wavelength) in glass with femtosecond laser pulses.",
author = "Y. Cheng and Y. Liao and K. Sugioka",
year = "2013",
doi = "10.1109/CLEOPR.2013.6600169",
language = "英语",
isbn = "9781467364751",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
booktitle = "2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013",
note = "10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 ; Conference date: 30-06-2013 Through 04-07-2013",
}