@inproceedings{d26ffabfd6c04e5984b447442e1f0bf8,
title = "Fabrication and optical property of two-dimensional infrared photonic crystals by deep reactive ion etching in Si",
abstract = "We report the fabrication and characterization of two-dimensional silicon-based photonic crystal structures realized by deep reactive ion etching method. Photonic crystals of square and triangular lattices with very high aspect ratios up to 33 have been achieved. Photonic bandgap behaviors are identified by the transmission and reflection spectra measured by using a Fourier transform infrared spectrometer. The experiment results are in good agreement with calculated band structures.",
author = "Mei Zhou and Chen, \{Xiao Shuang\} and Yong Zeng and Jing Xu and Wang, \{Shao Wei\} and Wei Lu",
year = "2004",
language = "英语",
isbn = "0780384903",
series = "Conference Digest of the 2004 Joint 29th International Conference on Infrared and Millimeter Waves and 12th International Conference on Terahertz Electronics",
pages = "183--184",
editor = "M. Thumm and W. Wiesbeck",
booktitle = "Conference Digest of the 2004 Joint 29th International Conference on Infrared and Millimeter Waves and 12th International Conference on Terahertz Electronics",
note = "Conference Digest of the 2004 Joint 29th International Conference on Infrared and Millimeter Waves and 12th International Conference on Terahertz Electronics ; Conference date: 27-09-2004 Through 01-10-2004",
}