@article{ab85aaefbd1349b7a0643358b07b116d,
title = "Fabrication and dynamic measurement of micromechanical variable optical attenuator",
author = "Mao, \{Hui Bing\} and Yang, \{Chang Li\} and Xin, \{Pei Sheng\} and Peng, \{De Yan\} and Zhu, \{Zi Qiang\} and Lai, \{Zong Sheng\}",
year = "2004",
month = feb,
language = "英语",
volume = "25",
pages = "9",
journal = "Bandaoti Guangdian/Semiconductor Optoelectronics",
issn = "1001-5868",
publisher = "China National Publishing Industry Trading Corporation",
number = "1",
}