摘要
The preparation of Bi2Ti2O7 thin films on planatized Pt/Ti/SiO2 substrates by metalorganic decomposition (MOD) technique was studied. Investigations show that the Pt/Bi2Ti 2O7/Pt capacitors had excellent insulating properties. The optical constants (n,k) of Bi2Ti2O7 thin films were obtained by spectroscopic ellisometric measurements. It was concluded that Bi2Ti2O7 thin films were applicable as metal-oxide-semiconductor devices.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | 1214-1216 |
| 页数 | 3 |
| 期刊 | Applied Physics Letters |
| 卷 | 85 |
| 期 | 7 |
| DOI | |
| 出版状态 | 已出版 - 16 8月 2004 |
| 已对外发布 | 是 |
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