Effects of electrodes on antiferroelectricity and fatigue endurance of Hf0.2Zr0.8O2 thin films

Dawei Li; Hongbo Liu; Luqiu Chen; Yu Shen; Guangdi Feng; Shenglan Hao; Zhenzhong Yang; Qiuxiang Zhu; Ke Qu; Bobo Tian; Junhao Chu; Chungang Duan

doi:10.1063/5.0202159

Effects of electrodes on antiferroelectricity and fatigue endurance of Hf_0.2Zr_0.8O₂ thin films

Dawei Li
, Hongbo Liu^*
, Luqiu Chen
, Yu Shen
, Guangdi Feng
, Shenglan Hao
, Zhenzhong Yang
, Qiuxiang Zhu
, Ke Qu^*
, Bobo Tian^*
, Junhao Chu
, Chungang Duan

^*此作品的通讯作者

物理与电子科学学院

科研成果: 期刊稿件 › 文章 › 同行评审

6 引用（Scopus）

摘要

The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf_0.2Zr_0.8O₂ thin films has been studied by a metal-antiferroelectric-metal capacitor structure using TiN and W as electrodes. The W|Hf_0.2Zr_0.8O₂|W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the capacitor using TiN as the electrode. Assisted by grazing incidence x-ray diffraction and scanning transmission electron microscopy, the different electrical properties are discussed based on the contents of different phases and the diffusion of oxygen from the thin film into electrodes.

源语言	英语
文章编号	132903
期刊	Applied Physics Letters
卷	124
期	13
DOI	https://doi.org/10.1063/5.0202159
出版状态	已出版 - 25 3月 2024

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title = "Effects of electrodes on antiferroelectricity and fatigue endurance of Hf0.2Zr0.8O2 thin films",

abstract = "The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf0.2Zr0.8O2 thin films has been studied by a metal-antiferroelectric-metal capacitor structure using TiN and W as electrodes. The W|Hf0.2Zr0.8O2|W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the capacitor using TiN as the electrode. Assisted by grazing incidence x-ray diffraction and scanning transmission electron microscopy, the different electrical properties are discussed based on the contents of different phases and the diffusion of oxygen from the thin film into electrodes.",

author = "Dawei Li and Hongbo Liu and Luqiu Chen and Yu Shen and Guangdi Feng and Shenglan Hao and Zhenzhong Yang and Qiuxiang Zhu and Ke Qu and Bobo Tian and Junhao Chu and Chungang Duan",

note = "Publisher Copyright: {\textcopyright} 2024 Author(s).",

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day = "25",

doi = "10.1063/5.0202159",

language = "英语",

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T1 - Effects of electrodes on antiferroelectricity and fatigue endurance of Hf0.2Zr0.8O2 thin films

AU - Li, Dawei

AU - Liu, Hongbo

AU - Chen, Luqiu

AU - Shen, Yu

AU - Feng, Guangdi

AU - Hao, Shenglan

AU - Yang, Zhenzhong

AU - Zhu, Qiuxiang

AU - Qu, Ke

AU - Tian, Bobo

AU - Chu, Junhao

AU - Duan, Chungang

PY - 2024/3/25

Y1 - 2024/3/25

N2 - The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf0.2Zr0.8O2 thin films has been studied by a metal-antiferroelectric-metal capacitor structure using TiN and W as electrodes. The W|Hf0.2Zr0.8O2|W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the capacitor using TiN as the electrode. Assisted by grazing incidence x-ray diffraction and scanning transmission electron microscopy, the different electrical properties are discussed based on the contents of different phases and the diffusion of oxygen from the thin film into electrodes.

AB - The influence of electrodes on antiferroelectricity and fatigue endurance of 15 nm thick Hf0.2Zr0.8O2 thin films has been studied by a metal-antiferroelectric-metal capacitor structure using TiN and W as electrodes. The W|Hf0.2Zr0.8O2|W capacitor shows significantly enhanced antiferroelectricity and better endurance compared to the capacitor using TiN as the electrode. Assisted by grazing incidence x-ray diffraction and scanning transmission electron microscopy, the different electrical properties are discussed based on the contents of different phases and the diffusion of oxygen from the thin film into electrodes.

UR - https://www.scopus.com/pages/publications/85189033399

U2 - 10.1063/5.0202159

DO - 10.1063/5.0202159

M3 - 文章

AN - SCOPUS:85189033399

SN - 0003-6951

VL - 124

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

M1 - 132903

ER -

Effects of electrodes on antiferroelectricity and fatigue endurance of Hf0.2Zr0.8O2 thin films

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Effects of electrodes on antiferroelectricity and fatigue endurance of Hf_0.2Zr_0.8O₂ thin films